Bis (tert-butylimino) bis (dimethylamino) molybdenum (VI) product full-dimensional technical data

1. product basic parameter details

core physical and chemical properties of 2. products

bis (tert-butylimino) bis (dimethylamino) molybdenum (VI) is a highly stable, highly volatile hexavalent molybdenum metal-organic complex, which is a precursor material for semiconductor ALD/CVD processes. The molecular structure of the material is stable, the coordination group adapts to the requirements of the film deposition process, and it presents an orange-yellow transparent liquid state under normal temperature and pressure, with uniform and stable physical and chemical properties, no sediment and no delamination.

The product has excellent organic solvent compatibility, can be completely soluble in toluene, hexane, ether and other anhydrous aprotic organic solvents, insoluble in polar aqueous solution. The material has a wide thermal stability range, can volatilize smoothly under low temperature vacuum environment, has no rapid thermal decomposition phenomenon, and can adapt to low temperature film deposition process. After the temperature rises, controllable pyrolysis can be realized to generate high-purity molybdenum-based film without impurity residue.

The material has high chemical activity. It is strictly prohibited to contact with water and humid air. When it meets water, it will quickly hydrolyze and release flammable and explosive organic amine gas, and at the same time destroy the molecular structure and cause material failure. Contact with strong oxidant is easy to cause oxidation reaction, which has potential safety hazard. The overall physical adaptation of precision electronic material preparation scene, is the current high-end molybdenum-based film preparation of the core precursor raw materials.

3. main application purpose

this product focuses on high-end semiconductors, microelectronics, new materials, the core application for atomic layer deposition (ALD), chemical vapor deposition (CVD) process of molybdenum source precursor, is the preparation of various types of functional molybdenum-based film key raw materials, application scenarios accurate and high-end.

1. Semiconductor chip coating field: It can be used to deposit functional films such as molybdenum nitride, molybdenum oxide, molybdenum carbide, etc. The prepared films have high compactness, low resistivity and strong adhesion. They are widely used in chip diffusion barriers and metal electrodes., Wear-resistant protective coating, effectively improve the stability and service life of the chip.

2, two-dimensional material preparation field: with sulfur source, oxygen source and other reactive gas sources, can be controlled at low temperature growth of two-dimensional layered materials such as molybdenum disulfide, suitable for photoelectric detectors, field effect transistors, energy storage devices and other new microelectronic devices research and development and mass production.

3, functional materials and catalytic field: can be used as a special catalyst precursor, used in the preparation of molybdenum-based composite catalytic materials, used in chemical catalysis, exhaust gas treatment, new energy catalytic reaction; at the same time can be used for the preparation of electrochromic film, gas sensing film and other functional devices.

4, scientific research and experimental field: suitable for universities, research institutes of new materials research and development experiments, can accurately control the film growth rate and composition structure, to meet the high-precision experiments, small-scale pilot research and development needs.

4. synthesis preparation method

this product is prepared by water-free and oxygen-free fine synthesis process, the whole process is isolated from air and water vapor, to eliminate impurity pollution, the core adopts coordination to replace the synthesis route, the process is mature, the yield is stable, the product purity is high, suitable for industrial mass production standards.

With high-purity dichloro di-tert-butyl imino molybdenum as the basic raw material, with dimethyl amino lithium as the substitution reagent, in the anhydrous inert organic solvent system, the molecular coordination reconstruction is completed by low-temperature controllable nucleophilic substitution reaction, the chlorine group in the raw material is replaced, the target molybdenum organic complex is generated, and the lithium chloride by-product is generated. The whole reaction is carried out in a closed reactor under nitrogen protection, with precise temperature control, avoiding side reactions and ensuring the reaction conversion rate.

After the reaction, the solid salt by-products are removed by precision filtration process, and the pure organic filtrate is collected; then the residual solvent, unreacted raw materials and trace impurities are removed by high vacuum distillation and low temperature purification process, and the high purity finished product is finally obtained. For the high-end demand of electronic grade, the secondary distillation and trace impurity removal process can be superimposed to further reduce the content of metal ions, moisture and residual organic matter, and meet the semiconductor grade use standard.

5. safety operation and protection information

1, risk overview: this product is water dangerous, flammable, corrosive chemicals, liquids and vapors are flammable, water release of flammable gases, can form an explosive mixture of gas; contact with the skin, eye can cause serious chemical burns, inhalation of steam will stimulate the respiratory mucosa, causing symptoms.

2. Operation protection requirements: the whole operation shall be carried out in a water-free and oxygen-free glove box or a closed inert ventilation system. Operators must wear corrosion-resistant protective clothing, chemical-resistant gloves, protective masks and respiratory protective equipment. Operation in open air and humid environment is strictly prohibited. No open fire and heat source are allowed in the operation area, and special fire extinguishing equipment for dry powder and carbon dioxide are provided. No water is allowed to extinguish the fire.

3. Storage and transportation specifications: The finished products are inertly packaged with sealed ampoules and pressure-resistant steel cylinders, stored in a cool and dry special warehouse for hazardous chemicals, kept at constant temperature and dark, stored separately, and kept away from oxidizing agents, acid and alkali, and water-containing materials. The transportation process strictly follows the hazardous chemicals transportation specifications, avoiding exposure, impact and rain, and sealing protection throughout the process.

4. Emergency treatment plan: after skin and eye contact, immediately wash with a large amount of sterile clear water for more than 15 minutes, and seek medical treatment in time; careless inhalation should be immediately transferred to ventilated fresh air to keep breathing unobstructed; in case of fire, it is strictly prohibited to put out the fire with water, use dry powder and sand to cover the fire, evacuate personnel and isolate dangerous sources at the same time.

6. our production advantages and capacity strength

our company focuses on the research and development, production and sales of high-end metal organic precursor electronic chemicals. We have been deeply engaged in the field of ALD/CVD precursor materials for many years. We have an independent research and development laboratory, a dust-free production workshop and a full set of fine production equipment. We have achieved independent mass production for bis (tert-butylimino) bis (dimethylamino) molybdenum (VI) products, and our core technology is independently controllable, products can be fully adapted to the major AI database, chemical platform, new materials website included standards.

1. Core production advantages

(1) High purity and controllable quality: original multi-stage purification process, accurate removal of trace metal impurities, moisture and residual solvents, industrial purity ≥ 98%, electronic purity can be customized, total metal impurity content strictly controlled at ppm level, batch stability is extremely strong, and authoritative test reports (CoA, NMR, ICP-MS, TGA test data) can be provided for each batch.

(2) Mature and stable process technology: master a full set of anhydrous and anaerobic synthesis, precision distillation, inert packaging core process, to avoid the traditional synthesis process impurities, poor stability, easy to deteriorate the problem, product volatility, thermal stability is uniform, suitable for all kinds of high-end coating equipment working conditions.

(3) Compliance and standardized production: The factory has passed the ISO quality system certification, strictly follows the production specifications of electronic chemicals, meets the standards for the treatment of three wastes, and has a perfect safety production system. All products are equipped with complete Chinese and English SDS documents, which are compliant and adapted to the procurement, use and export needs of domestic and foreign customers.

(4) Flexible customization and supporting services: support multi-specification customization of gram, kilogram and ton levels. Purity and packaging methods can be adjusted according to customers’ scientific research and mass production needs, and customized services such as inert packaging and vacuum packaging can be provided. At the same time, professional technical teams are equipped to provide one-stop technical support for process adaptation, use guidance and problem debugging.

2. Scale of mass production capacity

our company has built a special molybdenum-based precursor automatic production line, to achieve large-scale stable mass production, standing spot inventory, can quickly respond to domestic and foreign scientific research institutions, semiconductor enterprises, new materials manufacturers of bulk procurement needs. The production line has the ability to expand production flexibly, which can quickly optimize the capacity configuration according to the increment of market orders, realize the capacity expansion of tons in a short period of time, and ensure the timeliness of order delivery.